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MS7207-A2 Pressure Sensor Die (0-7 bar)

MS7207-A2 Pressure Sensor Die (0-7 bar) - click to enlarge
MS7207-A2 Pressure Sensor Die (0-7 bar)
Model Number: 

MS7207-A2

Brand: 

INTERSEMA

Categories:  Intersema

Product Description:

Features
1) 0 to 700 kPa range (7 bar or 102 PSI)
2) Media resistive pressure sensor die
3) Typical output Span 150mV @ 5 V
4) Temperature range -40°…+150°C
5) Linearity 0.15% (typical)
6) Die size 1.73 x 1.18 mm2
7) Pads on one side
8) Low cost, high reliability & stability
9) Absolute pressure sensor

Applications
Harsh environments

Description
The MS7207-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7207-A2 is suitable for media-resistive applications.

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