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MS7912 Pressure Sensor Die (0-12 bar)

MS7912 Pressure Sensor Die (0-12 bar) - click to enlarge
MS7912 Pressure Sensor Die (0-12 bar)
Model Number: 

MS7912

Brand: 

INTERSEMA

Categories:  Intersema

Product Description:

Features
1) 0 to 12 bar range (174 PSI)
2) High linearity (0.05% typical)
3) Absolute or differential
4) Small Die size 1.72×1.58 mm
5) High Reliability, Low Cost
6) Absolute or differential pressure sensors

Applications
1) Engine controls
2) Diving computer

Description
The sensor element of the MS7912 consists of a silicon micro-machined membrane with a Pyrex™ glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex™ glass at the backside of the sensor.

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